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HomeHome>电性测试实验室> 仪器设备能力>Everbeing BD-8
Everbeing BD-8

  设备编号:CECC-J002
  设备名称:Everbeing BD-8
  设备厂商:
  购买价格:
  购买日期:2006
  当前状态:使用中
  功能简述:分析探针台
  详细信息:
  

ITEM
MODEL
DESCRIPTION
1
BD-8
*Weight around 120 Kg 重量120Kg
*Dimensions: 780mmW X 660mmD X 700mmH780mm,660mm,700mm
*8”chuck and Center hole 250 micron (if needed) for single die as small as 300micronx300micron 8寸载物台,最小样品尺寸可?? 300micronx300micron
*Chuck flatness: 5um?
载物台平坦度5微米
* Huge Knob Stage X-Y Travel 8”-8” with lock each? 台子可以锁,X-Y8”-8”的移动
*1 micron Resolution? Backlash Free? 25mm/Drive? 25mm/圈无域度快速移动,1Micr的精度
*Standard Chuck theta 15 Degree Backlash free
平台的旋转角度是15

* mechanism 4 mm quick with lever with 1 mcron resolution
芯片载台可快速机械调节Z轴方向4mm,精度可达1微米
*Platen Up/Down quick 6 mm by easy-gripped lever handle with lock 针座平台可快速上升下降6mm,快速上升下降可以锁定
*Platen Up/Down fine 25 mm by huge knob with resolution 1 micron 平台上升下降25mm,精度1Micro
* For probing height adjustable specifically for probe card tip overdrive setup
可调整放置探针卡
2
光学部分
High resolution of MITUTOYO? 高分辩MITUTOYO显微镜
*Continuous Zoom 1X ~2X?
二倍光学放大
Eyepiece
目镜:10X wide field 广视角 10倍目镜
Objective 2X
Working distance: 34mm2倍物镜工作距离 34mm
10X
Working distance: 33.5mm 10倍物镜工作距离33.5mm
20XWorking distance: 20mm 20倍物镜工作距离22mm
50X
Working distance:20.5mm 50倍物镜工作距离20.5mm
100XWorking distance: 13mm 100倍物镜工作距离13mm
*150W high power white Light Intensity Stepless Control 150W白光光源
*Microscope X-Y? travel 2”x2” 1 micron resolution 显微镜可X-Y轴移动2”x2” 精度1micron
*Microscope coarse Z travel
显微镜粗调焦距50.8mm
3
探针座
*Vacuum base 真空吸附底座
*X-Y-Z 12mm-12mm-12mm X-Y-Z
方向上可做12mm的微调
*Linear Motion
线性运动
*0.7Micro? Resolution
精度是0.7微米
*Coaxial Tip holder spring
50Ohm 三轴隔离保护针臂,50欧姆阻抗
4
探针
Probe Tip , 0.2micron 0.6 micron 1 micron 2 micron 10 micron